Horizontal Silicon Carbide CVD Coating Furnace For Epitaxial Layer Of Semiconductor

This equipment is used for silicon carbide coating of carbon-based/ceramic-based materia, especially deposition of silicon carbide on the surface of the semiconductor epitaxial susceptor and etching ring.

Epitaxy susceptor, a high-purity graphite disk, with a circular groove on it to fix the wafer substrate.The epitaxial susceptor made of graphite obviously cannot meet the ultra-high cleanliness requirements in the semiconductor process.Therefore we need to use chemical vapor deposition on the susceptor to wrap a layer of dense silicon carbide film.Wafer processes such as lithography and ion implantation are all carried out on the epitaxial layer.

At present, this equipment has been successfully applied to the production and preparation of epitaxial susceptor, etching rings and other semiconductor cavity parts.

Company profile:

Zhuzhou Ruideer Intelligent Equipment Co., Ltd（RDE）is a leading manufacturer of Vacuum Sintering Furnace (high temperature thermal treatment) and CVD coating furnace, focusing on process development, equipment production, sales and after-sales services. We are committed to supplying our customers with the highest level of quality products and services.

Founded in Sep 19th 2011,RDE has standardized workshops and office buildings, covering an area of more than 19,000 square meters, with more than 170 employees. Ruideer’s productivity reaches 120 sets of gas pressure sintering furnaces per year, 500,000 pieces of PVD coating per month, and 250,000 pieces of CVD coating per month.

RDE furnaces have been used successfully both nationwide and worldwide for many years. Keep working on technical developments and improvements, gaining 105 intellectual property authorizations, 10 invention patents and 4 international patents.

Certification:

Design standards

The equipment is designed in accordance with the pressure vessel requirements of the Quality and Technical Supervision Bureau, and is qualified after pressure testing and shipped. The electrical design and construction meet national standards.

• Installation pre-test and pre-acceptance

The equipment is fully assembled in our factory, including all pipelines, vacuum pipelines, process gas pipelines, cooling water pipelines, compressed air pipelines, etc. Pre-testing can be carried out after installation. At the customer site, pipelines other than the equipment are provided by the customer. The installation also includes the connection of all cables. At the customer site, the main cable connecting the power cabinet is provided by the customer. After installation, we conduct vacuum and positive pressure leakage tests on the entire equipment, as well as mechanical and electrical function tests.

• Disassembly and transportation

The equipment will be disassembled in several large parts, packed in a standardized manner, and loaded into the transport vehicle.

• Customer site installation and commissioning

The Redel after-sales engineer will lead the team to complete commissioning, product trial burning and other work within 20 working days. The customer needs to make appropriate preparations and provide the necessary tools, such as hoisting and lifting equipment. And provide installation personnel support (it is recommended to have 1 mechanical personnel and 1 electrical personnel).

• Final acceptance

After installation and commissioning, the equipment can be finally accepted in accordance with the requirements of the technical contract.

• Training

Our after-sales engineers will provide a systematic and complete on-site training, including operation, maintenance, troubleshooting, etc.

• Technical data delivery

To ensure safe operation and equipment maintenance, the following technical data will be provided to customers:

1. Equipment installation layout

2. User manual

3. Spare parts list

4. Electrical drawings

5.  Component manual

FAQ

Are you a factory or trading company?

Q: Are you a factory or trading company?

A:We are China leading high-temperature vacuum furnace manufacturer with over 10 years’ experience.

Do you have customization or OEM service?

Q: Do you have customization or OEM service?

A:Yes,we have powerful R&D team and high-tech equipment.So we can not only supply the regular model,but also the customizable furnace as the repuirment of our clients.

What's your advantage?
Q:What's your advantage?
A:

●Quick response to your enquiry

●High quality control

●Stable supply chain

●Timely delivery

●Excellent after-sales service